- Hold
- Pause Flow According to Production Rules
- PM
- Preventive Maintenance
- Qual
- Verification That Equipment or a Process Meets Requirements
- CIM
- Manufacturing Information and Automation Systems
Between Alarm and Action Lies Engineering Judgment
Whether an out-of-limit metric holds a lot, disables equipment, or notifies staff depends on fab configuration and business rules; not every SPC system automatically controls MES. Investigations must confirm event scope, reference conditions, actual processing history, and inspection validity. Customers may already have automation, and improvements should be evaluated against that real baseline.
- 01TriggerStart with an Engineering Question
It may concern a defect anomaly, equipment introduction, or verification after maintenance.
- 02QueryInspect Ready Images and Analyses
First confirm the objects, inspection definitions, and comparable references.
- 03InvestigatePerform Standard Checks and Address Evidence Gaps
Professional methods guide the next check; propose supplementary analysis when needed.
- 04DeliverEngineers Review and Arrange On-Site Actions
Deliver a report, candidate explanations, and a verification plan, retaining unresolved matters.
Three Distinct Entry Points in Day-to-Day Operations
| Operational Entry Point | Investigation Task | Useful Deliverable |
|---|---|---|
| Inline Defect Excursions | Assess Anomaly Patterns and Screen Possible Sources | Localization Level, Candidate Explanations, Evidence Gaps, and the Next Check |
| New Tool / Chamber Baseline | Evaluate Matching, Stability, and Compatibility Against a Reference | Deviation Metrics, Comparison Conditions, and a Verification Plan |
| Engineering Review | Check Executed Actions and How Results Support Explanations | Actual Process, Valid Evidence, Unresolved Issues, and Method Improvements |
Engineering reviews can support material-review and related workflows. Reports should state evidence strength and applicable scope, retaining multiple possible causes, measurement blind spots, and unfinished verification.
Define Automation Permissions by Actions Rather Than a Slogan
Investigations should initially use read-only data access with explicit tools, objects, and budgets. Saving reports is a local write; training or deploying a model is another action class; equipment control and recipe changes have separate risks and approval paths.
WaferPilot should clearly state what is currently permitted, who can take over, and which recommendations remain unexecuted. Each deployment must separately agree permissions for reading, saving, training, deployment, and equipment control.
A transparent audit log must capture every executed SQL query, image transformation, and statistical calculation.
Serving as an Investigation Co-Pilot in Engineering Workflows
Within connected task scope, WaferPilot assists observation, checking, report organization, and recommendations. Automatic event triggers, cross-system data retrieval, and on-site loops require implementation and acceptance per environment. Time savings and faster return to service are measured through pilot results.
Deliverables for Engineers:An investigation report and action recommendations stating inspection goals, required data, execution conditions, and items awaiting engineer confirmation.
View the Current Demo and Capability Scope →Related Reading & References
Below are verifiable industry references; specific processes, permissions, and acceptance criteria are governed by fab site specifications.